Summary

Si～SiO2界面における熱応力とひずみ

菅野卓雄 懸本和朗 

Vol.49 No.10 pp.1887-1895

Publication Date:1966/10/01

Online ISSN:2188-2355

Print ISSN:0913-5693

Type of Manuscript:論文・資料

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Online ISSN:2188-2355